Micro Vision

The observational and measurement system in the micro environments to manipulate objects in the micro world is becoming necessary in many fields, such as manufacturing; “Micro Factory (Fig.1)”;one of the past Japanese national project, and medical usages; the micro surgery. Most of the past researches in the micro environments might be only focused on the micro manipulation but not on the micro observation and measurement, which might be very important to operate. Actually, the micro operation includes the scale factors; i.e. the van der Waals forces are larger than the Newton force in the micro environments. Furthermore the micro vision has the “optical scale factors” on this micro observation, i.e. the small depth of a focus on the microscope, which could not allow us to feel the micro environments, intuitively. For example, if the focus is on some objects in the microscope, the actuator hands could not be observed in the same view at the same time with the microscope. On the other hand, if the focus is on the actuator hands, the object could not be observed. Figure 2 shows a simple 3D construction example constructing a micro scarecrow, 20um height, with 4 um six grass balls and one grass bar on the micro wafer. And Fig.3 show the two typical microscopic views putting the second glass ball onto the first glass ball. Left figure (a) in Fig.3 shows the first glass ball in focused, but the gripper is blurring at almost same position, because of the different depth. And right figure (b) shows the gripper in focused. Therefore, the operator has to change the focal distance with the microscope to observe while operating the microactuator, simultaneously.